China Accumulates 343 Immersion Deep Ultraviolet Lithography Machines

China's semiconductor factories have stockpiled approximately 343 immersion deep ultraviolet lithography systems in recent years, valued at several billion dollars. The Centre for Technology & Statecraft, established in August 2026, released a report in late September co-authored by former U.S. export control official Nicholas Brown and former White House and Commerce Department technology policy advisor Saif Khan. The report estimates that about 270 of these machines are ASML's Twinscan NXT:1980i. Although these devices are behind extreme ultraviolet lithography machines, they can be modified for the production of 7-nanometer logic chips and artificial intelligence processors. Chinese wafer fabs spent over $13 billion in 2024 to acquire approximately 90 NXT:1980i units, followed by another 89 units in 2025. ASML disclosed that China's share of its net system sales was 41% in 2024, 33% in 2025, dropping to 19% in the first quarter of 2026 and 14% in the second quarter. Since September 2023, the Netherlands has required export licenses for the NXT:2000i and more advanced immersion deep ultraviolet equipment, prohibiting shipments to China; a year later, the licensing requirement was extended to the NXT:1980i, although this model can still be approved for shipment on a case-by-case basis.

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